3M氟化液FC-3283是无色透明全氟化学品，具有良好的化学惰性、电气绝缘性能、热传导性和独特的第表面张力广泛应用于半导体制造厂作为热传导介质。其液体温度范围为-50°C 至128°C，主要应用于蚀刻设备、离子注入设备、测试设备及其他设备。因为FC-3283是单一组分，所以其成分不好出现降解或者过期。FC-3283沸点高，其随时间的挥发也比较少。
3M Fluorinert Electronic Liquid FC-3283 is a clear, colorless, thermally stable,fully-?uorinated liquid ideal for use in many single phase heat transfer applications in the semiconductor manufacturing industry. Its liquid range (-50°C to 128°C) makes it ideal for a variety of applications such as etchers, ion implanters, testers and others. Because Fluorinert liquid FC-3283 is primarily a single compound, its composition will not shift or fractionate with time. This keeps ?uid loss to a minimum and insures that transport properties will not change with time.
Physical Properties物理化学性质
Properties |
FC-3283 |
|
Appearance外观 |
无色透明 |
|
Average Molecular Weight平均分子量 |
521 |
|
Boiling Point (1 atm)沸点 |
128℃ |
|
Pour Point倾点 |
﹣50℃ |
|
Estimated Critical Temperature最高承受温度 |
543 K |
|
Estimated Critical Pressure最高承受压力 |
1180000pa |
|
Vapor Pressure蒸汽压 |
1440pa |
|
Latent Heat of Vaporization (at normal boiling point挥发潜热 |
78J/g |
|
Liquid Density液体密度 |
1820kg/m3 |
|
Kinematic Viscosity运动粘度 |
0.75 centipoise |
|
Absolute Viscosity绝对粘度 |
1.8centipoise |
|
Liquid Speci?c Heat比热 |
1100 J/ kg°C |
|
Liquid Thermal Conductivity导热率 |
0.066 W/ m°C |
|
Coef?cient of Expansion膨胀系数 |
0.0012 /°C |
|
Refractive Index折光率 |
1.290 |
|
Water Solubility溶水能力 |
|
|
Solubility in Water水中溶解力 |
|
|
Ozone Depletion Potential臭氧破坏潜值 |
0 |
|
Dielectric Strength介电强度 |
43 kV, 0.1" gap |
|
Dielectric Constant介电常数 |
1.89 |
|
Electrical Resistivity绝缘强度 |
5.0 x 10(15)ohm cm |
